Process engineers in semiconductor manufacturing face a critical challenge: maintaining consistent thermal conditions across fabrication steps such as vapor deposition, etching, and chemical delivery. In these sensitive environments, even minor temperature fluctuations can negatively impact deposition rates, film uniformity, and etch precision.
PFA or PTFE tubing with Insulon Vacuum Jacketed Hose combines non-metallic wetted surfaces, smooth internal bore, and advanced vacuum insulation to minimize heat transfer to or from the carrier gas.
PFA and PTFE for high purity semiconductor fluid handling
PFA (perfluoroalkoxy alkane) and PTFE (polytetrafluoroethylene) are fluoropolymers. These materials are used when applications require corrosion resistance, high purity, and chemical stability at elevated temperatures.
PFA and PTFE are often used for wetted parts in pumps, valves, and tubing that carry acids, solvents, and other aggressive fluids used in etch and deposition processes.
Thermal losses coming from uninsulated transfer lines
Uninsulated PFA and PTFE transfer lines that move pre-heated chemicals or gases between sub-fab storage and the process chamber often experience thermal degradation along the way. This can result in inconsistent temperatures, condensation, or unintentional phase changes. Failure to manage these potential issues can compromise process control.
This is especially problematic for vapor deposition processes (CVD, ALD), where thermal uniformity is crucial for film consistency and repeatability. Likewise, in etch processes and photoresist delivery, precise temperature regulation ensures reaction rates and flow behavior remain within spec.
Vacuum insulated PFA and PTFE tubing
To address this gap, manufacturers are pairing PTFE and PFA tubing with Insulon Vacuum Jacketed Hose.
Insulon Hose utilizes a double-walled construction and proprietary form of vacuum insulation to dramatically reduce heat loss. The ultra-high vacuum barrier minimizes conduction and convection, maintaining process temperatures across long runs or through thermally variable environments.
When the thermal performance of Insulon is combined with the chemical inertness of PTFE or PFA, the assembly delivers material compliance and maximum thermal efficiency in one package. Benefits include:
- Thermal stability: Reduce temperature fluctuations and maintain precise thermal profiles for heated or chilled fluids.
- Process consistency: Enable tighter control over critical process variables in deposition, etch, and chemical delivery.
- Lower contamination risk: Maintain temperature-sensitive chemical integrity during transfer, reducing particle generation and unwanted reactions.
Applications
PFA and PTFE tubing deliver on chemical compatibility and pairing them with Insulon Vacuum Jacketed Hose unlocks the next level of thermal control. Whether your system is handling hot acids, chilled DI water, or vapor-phase precursors, insulating PFA with Insulon vacuum insulation protects both the process and the product. Applications include:
- CVD and ALD deposition lines, where temperature-sensitive precursors require tightly controlled delivery
- Wet etch and clean tools, especially those using aggressive chemistries like HF or HCl
- Photoresist and developer lines, where minor deviations in temperature can negatively affect pattern resolution
Learn more about PFA and PTFE tubing with Insulon Vacuum Jacketed Hose →