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Home » Insulon® Products » Insulon® Fluid Feedthroughs for Vacuum Chambers

Insulon® Fluid Feedthroughs for Vacuum Chambers

thermally insulated vacuum jacketed hose feedthrough for vacuum chambers

Continuous thermal insulation along the fluid path, from supply to in-vacuum delivery point

Insulon® Vacuum-Insulated Fluid Feedthroughs deliver continuous thermal insulation from the supply point, across the chamber wall, and to the in-vacuum delivery point. Equipped with a self-contained vacuum annulus spanning the entire vacuum jacketed hose assembly, Insulon Feedthroughs route freely on both sides of the wall to eliminate the rigid constraints of conventional designs. This flexible construction enables high-precision thermal management for both low- and high-temperature fluids without the need for rigid tube bending.

1. Atmosphere-side hose run

Route fluid from the supply source to the chamber wall with minimal condensation, ice formation, and heat ingress on the atmospheric side.

2. Chamber-wall fitting

The vacuum-rated flange fitting (select from KF, CF, ISO, NPT, weldable, and custom configurations), mounts to the chamber wall and maintains both the chamber vacuum seal and the thermal insulation continuity of the hose assembly.

3. In-vacuum hose run

Inside the chamber, insulation continues to the delivery point. The sealed vacuum jacket suppresses radiant heat load from warm chamber walls, maintaining fluid temperature to the point of use.

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End fitting options include Swagelok compression fittings and adapters
End fitting options include Swagelok compression fittings and adapters
Select from a range of flange options to fix to the vacuum chamber
Select from a range of flange options to fix to the vacuum chamber
End fitting options include flared swivel JIC or AN nuts
End fitting options include flared swivel JIC or AN nuts

Engineered for the full fluid path

Every design decision addresses a limitation of conventional coaxial feedthrough technology. Insulon Feedthroughs go beyond conventional solutions to deliver continuous thermal insulation from supply connection to in-vacuum endpoint.

Self-contained insulation

The vacuum annulus is sealed permanently at manufacture. Insulation performance does not depend on chamber vacuum level and does not degrade when the chamber is vented, cycled, or at atmosphere.

End-to-end coverage

Insulation runs continuously from the supply connection, through the chamber wall, to the in-vacuum delivery point. There are no uninsulated hose segments on either side of the wall.

Minimize condensation and icing

Vacuum insulation maintains the outer jacket surface near ambient temperature, within and without the vacuum environment, improving cleanliness by preventing condensation and ice build-up.

Flexible routing

The fully annealed corrugated Insulon Fluid Feedthrough Hose routes freely in any direction, inside or outside the chamber. With no fixed geometry constraints, Insulon Feedthroughs eliminate rigid tube bending.

Full flange compatibility

Available with KF (NW/QF), ConFlat (CF), ISO, NPT bulkhead, and custom configurations. Compatible with flange standards used across the vacuum industry, with additional mounting options available on request.

Wide temperature range

Insulon vacuum insulation is engineered for fluids from -270 to 815°C. Suitable for liquid helium, liquid nitrogen, sub-ambient chilled fluids, ambient coolants, and high-temperature process fluids.

Insulon Feedthroughs vs. conventional cryogenic feedthroughs

Standard dual-tube coaxial feedthroughs solve the wall-penetration problem. Insulon Feedthroughs insulate the entire fluid path.

Feature Conventional coaxial feedthrough Insulon® Fluid Feedthrough
Insulation at chamber wall ✅ Coaxial vacuum gap (borrowed from chamber) ✅ Sealed Insulon vacuum annulus
Insulation on atmosphere-side hose ❌ Not included; separate component required ✅ Continuous, integral to assembly
Insulation on in-vacuum hose ❌ Not included; bare tube exposed to radiant load ✅ Continuous; suppresses radiant heat ingress
Depends on chamber vacuum for insulation ❌ Yes, performance degrades when chamber is vented ✅ No; sealed, independent vacuum annulus
Condensation / icing on air side ⚠️ Risk present on hose runs outside chamber ✅ Minimized; jacket surface near ambient temp
In-vacuum routing flexibility ⚠️ Rigid tube; geometry fixed at installation ✅ Flexible corrugated hose; routes freely
Maintenance vacuum required ❌ Vacuum gap requires chamber to be pumped ✅ No; sealed at manufacture, zero maintenance
High-temperature fluid capable ⚠️ Some products rated to +300°C–+450°C ✅ Yes, to +815°C

Applications

If your application involves cryogenic or high-temperature fluid delivery into a vacuum chamber, Insulon Fluid Feedthrough Hoses were designed for you. Insulon Feedthroughs address three limitations of conventional feedthrough assemblies: uninsulated hose segments, insulation that depends on the chamber vacuum, and rigid in-vacuum tube routing.

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SEMICONDUCTOR

Wafer chuck & cold stage cooling

For cryogenic fluid delivery to temperature-controlled substrates inside process chambers. Insulon Feedthroughs eliminate condensation on the air side and maintain stable fluid delivery temperatures regardless of chamber vacuum state during process cycles.

  • Process cooling
  • Thermal chucks
  • Cold traps
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AEROSPACE / TVAC

Thermal vacuum test chambers

For delivery of liquid or gaseous nitrogen for cold-soak testing inside large thermal vacuum chambers. Continuous insulation reduces fluid consumption and minimizes ice buildup that can contaminate the chamber environment or compromise test article surfaces.

  • Thermal vacuum chambers
  • Cryogenic simulators
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RESEARCH

Cryostat and superconducting magnets

For liquid helium and nitrogen supply lines that penetrate the vacuum jacket of cryostats and dilution refrigerator systems. Insulon Feedthroughs maintain thermal isolation at the ingress without relying on the cryostat vacuum for insulation.

  • Physics labs
  • Superconducting experiments
  • Cryogenics R&D
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INDUSTRIAL

PVD and CVD process cooling

For temperature-controlled fluid delivery to targets, substrate heaters, or magnetrons inside deposition chambers. Insulon Feedthroughs maintain process fluid temperatures while minimizing minimize the amount of heat lost to the chamber environment.

  • Deposition (PVD, CVD) with temperature-controlled substrates

Technical Specifications

THERMAL

Operating temperature range-270 to 815°C
Insulation methodInsulon® sealed vacuum
Vacuum compatibilityHV / UHV

CONNECTIONS

Hose end fittingsCompression fittings | Adapters | VCR | Flared swivel nuts | Flanges | Custom
Vacuum interface flangeKF | CF | ISO | Custom

FLUID COMPATIBILITY

Cryogens (LHe, LN2, LAr, etc.)✓ Compatible
Chilled water / glycol✓ Compatible
High temp. process fluids✓ Compatible

MATERIALS

Wetted surfaceFully annealed 316 stainless steel
Outer jacketFully annealed 316 stainless steel
Hose constructionCorrugated, flexible

DIMENSIONS

Standard Performance

Inner Diameter (ID)Outer Diameter (OD)MAWP (Low Pressure)MAWP (High Pressure)Min. Static bend radius
1/4″1.05″72 psi @ RT750 psi @ RT3.98″
3/8″1.05″72 psi @ RT750 psi @ RT3.98″
1/2″1.27″72 psi @ RT750 psi @ RT5.00″
3/4″1.62″43 psi @ RT600 psi @ RT6.15″
1″1.95″43 psi @ RT500 psi @ RT7.62″

MLI Performance

Inner Diameter (ID)Outer Diameter (OD)MAWP (Low Pressure)MAWP (High Pressure)Min. Static bend radius
1/4″1.27″72 psi @ RT750 psi @ RT5.00″
3/8″1.62″72 psi @ RT750 psi @ RT6.15″
1/2″1.62″72 psi @ RT750 psi @ RT6.15″
3/4″2.38″43 psi @ RT600 psi @ RT9.41″
1″2.38″43 psi @ RT500 psi @ RT9.41″

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