Semiconductor fab and sub-fab systems rely on precise thermal management to ensure reliable performance and safety. When transferring high or low-temperature fluids between equipment and tool, proper thermal insulation is required to minimize heat ingress or egress.
Insulon vacuum jacketed hose are used to transfer thermal fluids from chillers and cryo-chillers, process heating and cooling equipment, deposition lines, and more. Precise temperature control helps increase yields, ensure product quality, and reduce downtime in these critical manufacturing environments.
- Available in sizes including 1/4″, 3/8″, 1/2″, 3/4″, and 1″ ID. Lengths up to 20 meters, depending on diameter.
- Operating temperature range from -270 to 815 Celsius.
- Pressure up to 750 psi, depending on diameter and temperature
- Compatible with a variety of end configurations including compression unions and adapters, flanges, and more
Chillers and cryo-chillers
Insulating chiller fluids as they. travel between the chiller and the tool is critical for maintaining precise temperature control. Insulon hose minimizes heat ingress, resulting in faster time-to-temperature. Insulon vacuum insulation helps improve the energy efficiency of the thermal circuit, and can help reduce the load on the chiller.
Insulon Hose for Chillers →Temperature control units
Process heating and cooling equipment requires insulated lines that can handle both low and high temperatures. Whether you’re insulating -100C or 250C, Insulon Hose delivers optimal performance for temperature control units relied upon in the semiconductor industry. (Insulon Hose’s full operating temperature range is from -270 to 815 Celsius.)
Insulon Hose for Process Heating →Deposition lines
CVD, PVD and other processes rely on precise temperature control to achieve uniform film deposition. Insulon vacuum jacketed hose ensures that high temperature fluids maintain their heat throughout the delivery system. Can be combined with PTFE or PFA tubing for a smooth internal bore and non-metallic wetted surfaces.
Insulon Hose with PTFE/PFA Tubing →Products
Resources
Improve temperature control for semiconductor fabrication equipment
