Semiconductor fab and sub-fab systems rely on precise thermal management to ensure reliable performance and safety. When transferring high or low-temperature fluids between equipment and tool, consistent and reliable flow depends on minimizing heat ingress or egress. Engineered with proprietary vacuum technology, Insulon products include transfer hoses, PTFE and PFA lines, and heat exchangers.
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Products
Insulon Vacuum Jacketed Hose
Engineered with proprietary vacuum insulation technology for maximum thermal efficiency in chiller, cryo-chiller, and process heating applications.
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PTFE or PFA Tubing with Insulon Hose
Combining PTFE or PFA tubing with Insulon Hose features non-metallic wetted surfaces, smooth internal bore, and maximum thermal efficiency for deposition and other applications.
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Insulon Triple Layer Heat Exchanger
Insulon heat exchangers feature a triple layer design: the process media, the traced fluid, and a third layer of vacuum insulation for superior heat retention.
Insulon Heat Exchangers →Applications
Chillers and cryo-chillers
Insulating chiller fluids as they. travel between the chiller and the tool is critical for maintaining precise temperature control. Insulon hose minimizes heat ingress, resulting in faster time-to-temperature. Insulon vacuum insulation helps improve the energy efficiency of the thermal circuit, and can help reduce the load on the chiller.
Temperature control units
Process heating and cooling equipment requires insulated lines that can handle both low and high temperatures. Whether you’re insulating -100C or 250C, Insulon Hose delivers optimal performance for temperature control units relied upon in the semiconductor industry. (Insulon Hose’s full operating temperature range is from -270 to 815 Celsius.)
Deposition lines
CVD, PVD and other processes rely on precise temperature control to achieve uniform film deposition. Insulon vacuum jacketed hose ensures that high temperature fluids maintain their heat throughout the delivery system. Can be combined with PTFE or PFA tubing for a smooth internal bore and non-metallic wetted surfaces.
Resources
Maintaining gas temperature in semiconductor deposition processes with vacuum insulated PFA lines
Improve temperature control for semiconductor fabrication equipment
